EDX-7000/8000/8100

Energy Dispersive X-ray Fluorescence Spectrometer

Extremely Flexible

Accommodates all types of samples from small to large, from powders to liquids. Options include a vacuum measurement unit and helium purge unit for highly sensitive measurement of light elements and a 12-sample turret for automated continuous measurements.

Sample Observation Camera and Collimators

Automatic collimator switching in four stages: 1, 3, 5, and 10 mm diameter

Select the irradiation chamber from four values to suit the sample size.
Select the most appropriate irradiation diameter for the sample shape: 1 mm diameter for trace foreign matter analysis or defect analysis; 3 mm or 5 mm diameter for small sample volumes.

Sample observation camera included standard

Use the sample observation camera to confirm the X-ray irradiation position on a specific position to measure small samples, samples comprising multiple areas, or when using a Micro X-Cell.

Automatic Replacement of Five Primary Filters

Primary filters enhance detection sensitivity by reducing the continuous X-rays and the characteristic X-rays from the X-ray tube. They are useful for the analysis of trace elements.
The EDX-7000/8000/8100 incorporates five primary filters as standard (six, including the open position), which can be automatically changed using the software.

Filter Effective Energy (keV) Target Elements (Examples)
#1  15 to 24  Zr, Mo, Ru, Rh, Cd
#2  2 to 5  Cl, Cr
#3  5 to 7  Cr
#4  5 to 13  Hg, Pb, Br
#5  21 to 24(5 to 13)*  Cd (Hg, Pb, Br)

* This filter also cuts the background in the energy range shown in parentheses ( ).

 
 

 

Effect of the Primary Filters

 

Freely Combine Collimators and Primary Filters

The collimators and primary filters are driven independently and can be combined to address specific requirements. Select the optimal combination from 24 (6 filters x 4 collimators) available options.
Quantitative analysis using the FP method is possible with all combinations.

Optional Vacuum Measurement Unit and Helium Purge Unit

Sensitivity for light elements can be increased by removing atmosphere. Two options are available: a vacuum measurement unit and a helium purge unit.
The helium purge unit is effective when measuring liquid samples and samples that generate a gas and cannot be measured in a vacuum.

Relative Sensitivity of Measurements with Helium Purging and in Air (sensitivity in vacuum = 100)

Profile Comparison in Vacuum and Air
(sample: soda-lime glass)

Advanced Helium Purge Unit (Option)

This proprietary system (Japanese Patent No. 5962855) efficiently purges the instrument with helium gas to achieve an approximately 40 % reduction in purge time and helium gas consumption compared to previous units.
(Option for EDX-7000/8100)

Profile Comparison in Air and Helium After Purging
(EDX-7000 / sample: sulfur in oil)

Profile Comparison in Air and Helium After Purging
(EDX-8100 / sample: fluorine in fluorine coating agent)

12-Sample Turret (Option)


The addition of the turret allows automated continuous measurements. It improves throughput, especially for measurements in a vacuum or helium atmosphere.

For Research Use Only. Not for use in diagnostic procedures.

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