SMX-1000/1000L
Microfocus X-Ray Fluoroscopy System


Compact and combine ease of use with advanced functionality

SMX-1000/1000L

This compact, easy-to-operate, high-functionality X-ray inspection system can also be used as a CT system simply by adding a VCT unit.

Our new SMX-1000/1000L provides high-clarity images with no distortion or unevenness thanks to a built-in digital FPD (flat panel detector) combined with a hermetically sealed microfocus X-ray tube. Newly-developed easy-to-use software is included that automatically sets inspection conditions after sample types are specified, allowing you to efficiently perform a variety of inspections. Instrument operation is simple and includes a range of functions such as navigation using images from a visible-light CCD camera, a step feed function, teaching, an image database, and various types of measurements. Adding the optional VCT unit allows you to easily acquire CT images.

Application

Both the SMX-1000 and SMX-1000L provide high-magnification nondestructive fluoroscopic examinations of junction conditions (disconnect, contact) of ultra-micro parts on high-density PCBs, BGAs, CSPs, or system LSIs.

Features

Clear images

Combination of the latest digital FPD (flat panel detector) and our image processing technology produces clear images with no distortion.

Fluoroscopy up to 60°

Defects not detectable using vertical radiation can be detected using angular fluoroscopy. This instrument is the first general-purpose model equipped with an angular fluoroscopy function. FPD can be tilted up to 60°, enabling fluoroscopy at a wide range of angles, while maintaining the specified magnification.

Wide sample door and large table for higher efficiency

The new double-slide door system provides a large 535 (W) x 400 (H) opening that is 2.2 times larger than our former models. The 400 x 350 table is the largest in its class, allowing large-size PCBs to be easily examined. (L size 570 x 670 table is available for SMX-1000L)
* Stroke is shortened 50 mm in each direction.

Superior operability

Inspection condition preset functions

Simply select a setting from the inspection condition list to immediately view the most suitable image of a part (material) without changing X-ray conditions, thanks to each image's wide dynamic range.

Positioning via exterior-view CCD

The stage can be positioned using an image from a CCD camera that can view the entire stage. This allows the stage to be immediately moved to the desired location.

Positioning on the live image (mouse operation only)

Since all instrument operations can be performed using a PC mouse, operators can concentrate on the inspection using just the monitor screen. A useful “center shift” function moves the location clicked by the mouse to the center of the monitor screen.

A wide range of functions provide operator support

Step feed function

This function moves the stage in even increments and improves the efficiency of inspections of samples with identical shapes, such as items placed on pallets.

Teaching function

This function moves the stage to a pre-registered inspection point. Registering an inspection point allows the stage to be moved quickly and improves inspection efficiency when repeatedly inspecting the same type of samples.

Image list

Displays images saved in a folder as thumbnails. As described below, this thumbnail display has a variety of functions to assist operators.

A variety of measurement functions are provided

Dimension measurements

Distances between two points, angles, and curvatures can be measured. Previously, size calibration was required for each image, however, this instrument calibration data is calculated internally together with fluoroscopy magnification for more efficient measurement.

BGA void rate measurement

When measurement is started after setting a threshold, measurement results of all surface protrusions are displayed. Acceptance judgment is automatically performed based on preset acceptance criteria and measurement results can be saved in CSV format files.

Area ratio measurement

The area ratio of an object in a specified ROI (region of interest) such as for die bond or solder wettability can be measured as the object area/ROI area value.

Wire sweep measurement

Wire sweep can be measured simply by clicking both ends of a wire and the maximum curve point and measurement results can be saved in CSV format files.

Major Specifications

  SMX-1000 SMX-1000L
Spatial resolution 5μm 5μm
Max.sample size 350 x 400 mm 570 x 670 mm
Stroke 300 x 350 mm 520 x 620 mm
Max.sample weight 5kg 5kg
Detector inclination 60° max 60° max
Max.output 90 kV (sealed X-ray tube) 90 kV (sealed X-ray tube)
Detector Digital flat-panel detector (FPD) Digital flat-panel detector (FPD)
Inspection visual field Approx. 2 to 35 mm Approx. 2 to 35 mm
Magnification Approx. 6x to 158x
(dynamic images to 127x)
Approx. 6x to 158x
(dynamic images to 127x)
Power supply AC100 V1kVA AC100 V1kVA
Dimensions 995 (W) x 990 (D) x 1285 (H) mm 1,490 (W) x 1,525 (D) x 1,325 (H) mm
Weight Approx. 500 Kg Approx. 950 Kg

Optional Equipment

VCT unit

VCT Unit

VCT Unit

Attaching the removable VCT unit provides clear cone-CT images in addition to X-ray fluoroscopic images.

MPR Images of a Capacitor

MPR Images of a Capacitor


Rotation/Inclination Unit

Attaching the removable rotate and tilt unit allows X-ray fluoroscopy of small parts from a variety of angles, helping to reduce chances of oversights.

Operation Box

Use the joystick and push-button switches on the operation box to manually move the table, change magnification, and operate the rotate and tilt unit.

Image Analysis Software XIV4-E

After images are acquired via an SMX-1000/SMX1000L and saved to a hard disk, this software allows them to be called up and processed using macros and high-performance image analysis functions not included with standard SMX-1000/SMX1000L models.

* For improvement purposes, instrument appearance and specifications are subject to change without notice.

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