Scanning Probe Microscope
High-Throughput Scanner Shortens Observation Times
Surface Roughness Analysis of a Vapor-Deposited Metal Film
The surface topology of a vapor-deposited metal film was observed using a scanning rate of 1 Hz and 5 Hz.
Image quality and surface roughness analysis results are equivalent.
Grating Surface Topology Measurement
The grating surface topology was observed at a scanning rate of 1 Hz and 5 Hz. The measurement by cross-section profile analysis shows that both give the same results.