SPM-9700
Scanning Probe Microscope(SPM)


Making the Unknown Visible


Scanning probe microscope (SPM) is a generic term for microscopes that scan sample surfaces with an extremely sharp probe to observe their three-dimensional image or local properties at high magnifications. The SPM-9700 offers higher performance, faster speeds, and easier operation.

Head-Slide Mechanism

High Stability & High Throughput

Sample replacement without stopping laser irradiation, outstanding irradiation stability, and significantly shorter analysis times.

Wide Variety of 3D Rendering Functions Using Mouse Operations

Confirm images magnified in a variety of directions easily using the mouse, and even analyze 3D cross-section profiles.

Ease of Operation Minimizes Distraction from Observation to Analysis

A guidance function to guide users through procedures, a navigation function that eliminates uncertainty about the observation position, and other features help ensure observations can be performed quickly and smoothly.

Functionality and Expandability to Meet a Wide Range of Requirements

A generous selection of measurement modes and excellent expandability helps ensure reliable measurements, regardless of the properties that a wide variety of samples may have, such as hardness or electrical conductivity.

Optional Products and Application Examples

WET-SPM Environment Controlled Scanning Probe Microscope

This allows controlling the sample and surrounding environment for processing or observing samples in a controlled environment.

An optional temperature and humidity controller, sample heating and cooling unit, sample heating unit, and gas spray unit are also available.

Particle Analysis Software

This allows extracting multiple particles from image data and calculating, analyzing, or displaying characteristic quantities for each individual particle. It also enables statistical processing as well. .

SPM + TriboScope Combination SPM and Ultra Micro Hardness Testing System

(TriboScope is a product of Hysitron, in the United States)
Performs hardness tests and scratch tests on ultra thin films.

SPM + nano-TA2 Combination SPM and Micro Thermal Analyzer System

(nano-TA2 is a product of Anasys Instruments)
Acquires 3D images of sample surfaces and analyzes thermal properties of only sub-micron-sized regions or topmost surfaces.

Specifications

Observation Modes Standard Contact
Dynamic
Phase
Lateral Force (LFM)
Force Modulation
Optional Magnetic Force (MFM)
Current
Surface Potential (KFM)
Resolution
 		  X, Y  0.2 nm
 Z  0.01 nm

 SPM Head
 
 		  Displacement detection system  Light source/optical lever/detector
 Light source  Laser diode (ON/OFF)
Irradiates cantilever continuously, even while replacing samples.
 Detector  Photodetector
 Scanner
 		  Drive element  Tube piezoelectric element
 Max. scanning range (X, Y, Z)  30 µm x 30 µm x 5 µm (standard)
125  µm x 125  µm x 7  µm (optional)
55 µm x  55 µm x  13 µm (optional)
2.5 µm x  2.5 µm x  0.3 µm (optional)
 
Stage
 
 		  Max. sample size  24 mm dia. x 8 mm
 Sample replacement method  Head-slide mechanism with integrated displacement detection system and cantilever
Samples can be replaced without removing cantilever.
 Sample fixing method  Fixed with magnets
 Z-Axis Coarse Adjustment Mechanism
 		  Method  Automatic, using stepping motor
Fully automatic, regardless of sample thickness
 Max. stroke  10 mm
 Signal Display Panel  Displayed quantity  Total incident light to detector (digital display)
 Vibration Damper  Anti-vibration base  Built into SPM unit
 Optical Microscope Observation  Method  Beam-splitter slide mechanism
Specialized Enclosure Method Not necessary or environment controlled chamber is used.
Environment Control Method Chamber can be added without modifying SPM unit.
You can find the data and the application, etc. obtained with SPM.

You can find the data and the application, etc. obtained with SPM.

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