Turbo Molecular PumpTMP-X3405 Series

Standard Specifications

Turbo molecular pump TMP-X3405LMTC
Inlet flange VG300 / ISO320B / VG350
Outlet flange KF40
Cooling method Water
Ultimate pressure (after baking) 10-7 Pa order
Maximum allowable Argon gas flow rate
(Note 1)
800 mL/min (Note 2)
(Pump's set temperature : 65 degrees C.)
Maximum allowable inlet pressure
(N2 continuous exhaust) (Note 1)
40 Pa
Maximum allowable outlet pressure
(N2 continuous exhaust) (Note 1)
270 Pa
Pumping speed
(Note 3)
N2 3200 L/s
Ar 3100 L/s
H2 2150 L/s
Compression ratio N2 2 x 108
H2 2 x 103
Rated speed 27600 rpm
Start-up time 12 minutes or less
Mounting position In any desired direction
Vibration level (by Shimadzu's method) 0.05 µm or less (0-peak)
Recommended pumping speed of backing vacuum pump in case of gas purge 2000 L/min or more
Display LED POWER / ROTATION / TEMP.CONTROL / ALARM
Communication Contact

REMOTE (D-sub 25 pin female, Screw lock size UNC 4-40)

Input : START / STOP / RESET / LOW SPEED

Output : ROTATION / NORMAL / ACC. / BRAKE / REMOTE / TEMP.STABLE / ALARM / WARNING

Serial RS-232C / RS-485
Speed variation Speed is variable between 25 % and 100 % of the rated speed (set as 0.1 %).
Water Flow rate 3 L/min or more
Pressure 0.2 to 0.4 MPa
Temperature 19 to 30 degrees C. (above dew point)
Admissible ambient magnetic field Radial direction 3 mT
Axial direction 15 mT
Input electric power Voltage Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz)
Maximum power 2.1 kVA
Mass 89 kg
  • (Note 1)Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable outlet pressure can not be satisfied at same time.
  • (Note 2)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
  • (Note 3)Without a protective net. Pumping speed for N2 is 2900 L/s with a protective net.

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