Turbo Molecular PumpTMP-V2304LM

Standard Specifications

Turbo molecular pump TMP-V2304LM
Inlet flange VG250 / ISO250B
Outlet flange KF40
Cooling method Water
Ultimate pressure (after baking) 10-7 Pa order
Maximum allowable Argon gas flow rate
(Note 1)
600 mL/min (Note 2)
Maximum allowable inlet pressure
(N2 continuous exhaust) (Note 1)
4.5 Pa
Maximum allowable outlet pressure
(N2 continuous exhaust) (Note 1)
200 Pa
Pumping speed
(Note 3)(Note 4)
N2 2100 L/s
Ar 2000 L/s
Compression ratio N2 1×108 or more
He 5×103
H2 9×102
Rated speed 33700 rpm
Start-up time 9 minutes or less
Mounting position In any desired direction
Vibration level (by Shimadzu's method) 0.01 µm or less (0-peak)
Recommended pumping speed
of backing pump in case of gas purge
1500 L/min or more
Display LED POWER / STATUS / ROTATION / NET
Communication Contact

REMOTE (D-sub 37 pin female, Screw lock size M2.6)

Input : START / STOP / RESET / LOW SPEED

Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION

Serial RS-232C / RS-485 (D-sub 9 pin male, Screw lock size M2.6)
Speed variation Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %)
Water Flow rate 3 to 4 L/min
Pressure 0.2 to 0.4 MPa
Temperature 19 to 30 degrees C. (above dew point)
Admissible ambient magnetic field Radial direction 3 mT
Axial direction 15 mT
Input electric power Voltage Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz)
Maximum power 1.2 kVA
Mass 56 kg
  • (Note 1)Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable outlet pressure can not be satisfied at same time.
  • (Note 2)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
  • (Note 3)Without a protective net. Pumping speed for N2 is 1950 L/s with a protective net.
  • (Note 4)Do not use corrosive gas because there is possibility that the pump breaks down by the product material.

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