Standard Specifications
Pump Main Unit
| Turbo molecular pump | TMP-3804LMC | |
|---|---|---|
| Inlet flange | VG300 / ISO320B | |
| Outlet flange | KF40 | |
| Cooling method | Water | |
| Ultimate pressure (after baking) | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate | 2200 mL/min (Note 1) | |
| Maximum allowable inlet pressure | 40 Pa | |
| Maximum allowable outlet pressure | 270 Pa | |
| Pumping speed (Note 2) |
N2 | 3800 L/s |
| Ar | 3400 L/s | |
| H2 | 2500 L/s | |
| Compression ratio | N2 | 1×109 or more |
| He | 3×104 | |
| H2 | 2×103 | |
| Rated speed | 24000 rpm | |
| Start-up time | 18 minutes or less | |
| Mounting position | In any desired direction | |
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | |
| Recommended flow rate of purge gas | 30 mL/min (Note 1) | |
| Recommended pumping speed of backing pump in case of gas purge |
1500 L/min or more | |
| Environmental Temperatures | 0 to 40 degrees C. | |
| Admissible ambient magnetic field |
Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Water | Flow rate | 2 to 4 L/min |
| Pressure | 0.2 to 0.5 MPa | |
| Temperature | 5 to 25 degrees C. | |
| Mass | 115 kg | |
- (Note 1)mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)
- (Note 2)Without a protective net for VG300 flange. Pumping speed for N2 is 3450 L/s with a protective net.
Power Supply Unit
| Power supply unit | EI-R04M | |||||||
|---|---|---|---|---|---|---|---|---|
| Battery | Not Necessary | |||||||
| Exchangeable compatibility | The control cable is interchangeable between any pump and power supply unit. | |||||||
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |||||||
| Communication | Contact | REMOTE (MR-34)
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| Serial |
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| Environmental conditions | Temperature | Operation 0 to 45 degrees C. (No dew condensation) | ||||||
| Relative humidity | 40 to 80 %RH | |||||||
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz) | ||||||
| Maximum power | 1.5 kVA | |||||||
| Mass | 8 kg | |||||||
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