Product

Industrial Equipment

Vacuum Equipment

Turbo Molecular Pumps TMP-LM Series

TMP-803M/MC/LM/LMC

Main Features

  1. The Power supplies, which use no battery, are the first half rack size units for turbo molecular pumps of magnetically levitated type.
  2. No maintenance is required for the power supply.
  3. The pump main body and the power supply are both compact and lightweight.
  4. An RS-232C serial interface is supplied as standard.
  5. No readjustment is required after the replacement of the cables and pump main bodies.
  6. The self diagnostic functions ensure easy location of faulty part(s).
  7. The cable is available in any length between 3 meters and 30 meters.

SPECIFICATION

Standard Specifications of Wide Range Turbo Molecular Pumps and Wide Range Chemically Resistant Turbo Molecular Pumps

TMP-803M/MC/LM/LMC

Turbomolecular pump TMP-803LM TMP-803LMC
Rotor coating None Coated
Cooling method Water cooled
Ultimate pressure (after bake out)Pa
(Torr)		 10-9 order
(10-11 order)
(Note 1)		 10-8 order
(10-10 order)
Maximum inlet pressure Pa (Torr) 400Pa
(3Torr)
Maximum outlet pressure Pa (Torr) 665Pa
(5Torr)
Pumping speed N2
(Note 2) He
H2
800L/s
800L/s
700L/s
Compression ratio N2
He
H2
109 or higher
8 x 104
4 x 103
Rated rotation speed 35000R.P.M.
Startup time 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120° C or lower
Vibration, measured by the Shimadzu method Less than 0.01mm
Weight 31kg
Recommended purge gas flow rate 20 - 30 mL/min
Recommended pumping speed of backing
vacuum pump during gas purging		 500 L/min or higher
Operational ambient temperature range 0 - 40° C
Allowable magnetic flux density
Radial directions
Axial directions
3mT
15mT
Cooling water   Flow rate L/min.
Pressure MPa (kgf/cm2)
Temperature ° C
1 - 3
0.2 - 0.5(2 - 5)
5 - 30
Applicable power supply model EI-D1003M

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