Product

Large Sample Compartment

The SolidSpec-3700/3700DUV have large sample compartments which allow large samples to be measured without sample destruction. Its internal dimensions are 900W x 700D x 350H mm.
A sample maximum of 700W x 560D x 40H mm can be set in the sample
compartment and an entire sample area of 12 inches or 310 x 310 mm sample is
measurable by mounting the Automatic X-Y stage (option).
The vertical optical path makes it possible to perform transmission or reflection measurements of large samples keeping them horizontal.

Large Sample Compartment with Automatic X-Y Stage

12 inch Silicon Wafer on Automatic X-Y Stage

Automatic Measurement

The Automatic X-Y stage developed for the SolidSpec-3700/3700DUV enables
automatic measurements for the points specified in advance while maintaining
the nitrogen gas purge.

Reflection spectra of SiO2 film on 12-inch silicon wafer

Thickness of SiO2 film on 12-inch silicon wafer