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Utilizing experience gained from many years of developing surface analysis technology and marketing the PC-SEM, Shimadzu proudly present the next-generation SEM! This is an era where anyone can use a SEM. SUPERSCAN is not a special device rather it should be used as a tool where GUI is achieved with WindowsNT and a user-friendly operation environment is achieved with a PC mouse.
| Resolution | 3.5 nm | |
|---|---|---|
| Magnification | x 20 ~ x 300,000 | |
| Accelerating voltage | 0.5 ~ 30 kV 10 V step | |
| Maximum specimen size | 125 mmf | |
| Specimen stage | Eucentric 5-axis motor stage | |
| X : 80 mm, Y : 40 mm | ||
| Z : 40 mm, R : 360° | ||
| T : -30° ~ +60° | ||
| Electron gun | Pre-centered W hairpin filament | |
| Autogun bias | ||
| Observation monitor | 17-inch SVGA monitor | |
| OS | WindowsNT | |
| PC/AT compatible | ||
| PC operating systems | Mouse, keyboard | |
| Image process function | Image memory 640 x 480 pixels | |
| 1280 x 960 pixels,Recursive filter, integral filter, | ||
| Y-MOD, gamma compensation, | ||
| binarization, local filter | ||
| Automated functions | Filament saturation, | |
| gun alignment, focus, | ||
| stigma, contrast brightness | ||