Product
Laboratory Instruments
Surface Analysis Apparatus
Scanning Electrom Microscope(SEM/EDX)
SSX-550
From SEM Observation through to EDX Analysis
Opening up a new world through an ergonomic integrated operation environment! Not only can points be observed but their composition can also be analyzed in one continuous, rapid flow.
Outline
Shimadzu Corporation - as a general analysis manufacturer of SEM, EPMA and EDX - have released the Analytical Scanning Electron Microscope SUPERSCAN SSX-550 packed with detailed X-ray analysis technology.
SUPERSCAN SSX-550 is a SEM-EDX combined system which achieves an ergonomic integrated operation environment from SEM observation through to EDX analysis.
Features
- SEM-EDX integrated design with streamline compactness realized.
- Shimadzu's SEM-EDX combined system enables smooth operating from observation to analysis at one monitor (used in the same way as the combination with Word and Excel).
- Graphical User Interface (GUI) is achieved with Windows NT.
- Functionally arranged easy-to-recognize icons make operating easy for even the beginner.
- SEM and EDX data are completely digital. Making files available via networks and creating reports are easy operations.
- The device can be used in assured knowledge that services - including maintenance - are fully covered as Shimadzu supply the whole system.
Main Specifications
SEM unit
| Resolution | 3.5 nm | |
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| Magnification | x 20 ~ x 300,000 | |
| Accelerating voltage | 0.5 to 30kV 10V step | |
| Sample size | Observation of all regions possible up to the maximum diameter of 125mm | |
| Specimen stage | Eucentric 5-axis motor stage X : 80mm, Y : 40mm Z : 40mm, R : 360° endless T : -30° ~ +60° |
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| Electron gun | Pre-centered W hairpin filament Auto gun bias |
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| Image process function | Image memory 640 x 480 pixels 1280 x 960 pixels Recursive filter Integral filter Gamma correction Binarization Local filter |
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| Automated functions | Filament saturation Gun alignment Focus Stigmator Contrast brightness |
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Computer
| PC, OS | PC/AT compatible machine Windows NT |
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| Monitor | 17 inch SVGA monitor | |
| Operating system | Mouse, keyboard | |
EDX Unit
| Detector | UTW detector : Resolution 144eV or less ,Area 10mm2, C to U Number of MCA channels : 4000 channels Liquid nitrogen container : 5l (standard), 10l (selectable) Liquid nitrogen rate of consumption : Approx. 1.0l/day Measuring time : 1msec units Temperature cycle : Possible |
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| Functions | Qualitative analysis KLM maker Automatic identification Manual identification |
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| Quantitative analysis Standardless ZAF method, f (rZ) method Standard ZAF method, f (rZ) method |
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| Line analysis Maximum 15 elements |
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| Mapping Maximum 15 elements Pixels: 32 x 32 to 512 x 512 Simultaneous display of 16 screens One of these is a SEM image |
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| Data processing Smoothing Background deletion Peak search Waveform (multi-layered peaks) division Adding and subtracting between spectrums Constant value adding and subtracting ROI setting (automatic and manual) Data display and screen output in real time |
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| Data display Expansion and reduction of all types Linear/log display switching Gradation setting (map charts) |
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