Product

Laboratory Instruments

Surface Analysis Apparatus

Scanning Probe Microscope(SPM)

SPM-9600

Environment Controlled Scanning Probe Microscope WET-SPM Series

The scanning probe microscope SPM-9600 can be upgraded to the environment controlled scanning probe microscope WET-SPM series by adding the optional environment controlled chamber. This - a Shimadzu's original sample setting mechanism - is a unique feature for the SPM-9500 with maximum consideration given to use inside the chamber including front-access operation, fully automatic approach, and open head design. The chamber is equipped with glove ports to enable sample preparation (cleaving, washing, drying, etc.) and exchanging while the environment is controlled. By combining options not only can SPM observations be made in specified gas atmospheres but also during sample heating and cooling, atmosphere humidity and temperature controlling, and sample gas spraying. The WET-SPM is an innovative system that delivers an even more dynamic surface world in nanometer scale.

Environment Controlled Chambers CH-II & CH-III

The environment controlled chambers CH-II (without TMP) and CH-III (with TMP) were designed specifically for the SPM-9600 series as a glove-port type chamber system with built-in vibration damper. The SPM unit can be easily installed inside the chamber from the rear. Changing from an in-atmosphere SPM to an environment controlled SPM opens the way for wide application (Japan Patent 262395, US Patent 5200616). As both the sample and total ambient environment can be controlled, no changes are required to enable SPM observations of samples processed under a controlled environment. Unhindered pretreatment in the chamber is possible thanks to a large viewing port and glove ports. Also, adding the chamber support option to offer in-situ SPM enables realtime investigation of surface changes when changes to physical parameters such as temperature, humidity, pressure, luminous energy, and concentration are made. The SPM can be used as both a in-atmosphere type and environment controlled type observation device as the SPM unit is easily loaded into and unloaded from the chamber.

Main Specifications

Ports Glove port: 2 ports
Large viewing port: 1 port
Unit loading port: 1 port
Sample loading port: 1 port
Exhaust port: 1 port
Spare port: 4 ports
Exhaust System Pumps Used
Rotary pump (160 l/min)
Turbo molecular pump (50 l/sec) (CH-III only)
Gas introduction mechanism Single-line automatic control
Electric current introduction terminal (7 pins) 16 terminals (spares included)
Vibration damper mechanism Air spring vibration damper incorporated

* All configurations and specifications are subject to change without notice.