Using the holographic exposure method and ion-beam etching technology, Shimadzu has developed laminar gratings that can be used for spectroscopy in a range from the vacuum ultraviolet region to the soft X-ray region. These diffraction gratings have grooves with a rectangular profile, which are directly etched into blanks made of, for example, synthetic silica. (Refer to Fig. 6.) Laminar gratings are recommended for applications involving oblique light incidence.
To enquire about laminar gratings, use the request form for laminar gratings for the vacuum ultraviolet region provided at the end of this page.