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- Laminar type Replica Diffraction Grating for Soft X-ray Region
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Optical Devices
Diffraction Gratings
Laminar type Replica Diffraction Grating for Soft X-ray Region
- Aberration-corrected Laminar-type Replica Diffraction Gratings for flat-field Polychromators in the range of Extreme Ultra-Violet Light(EUV:13nm).Suitable for the next-generation semiconductor lithography.
- Less High-Order Light due to Laminar type grooves configuration, Low stray light by Holographic manufacturing technology, andHigh-resolution from aspherical waves exposure method to correct Astigmatism aberration.
- Enable to easily produce spectrometers by combining with an array-type detector.
- Suitable for monitoring EUV lights as well as for Emission Spectroscopy
*RoHS：Directive 2002/95/EC on the Restriction of the Use of certain Hazardous Substances in Electrical and Electronic
Equipment
Specifications
| Classification | Unequally spaced curved-groove laminar-type replica grating *1 | |
|---|---|---|
| Blank material | BK-7 or equivalent | |
| Dimension tolerance | ±0.2(W)×±0.2(H) | |
| Center thickness tolerance | ±0.5(Ｔ) | |
| Grooved area | Total area less 2mm strip around the perimeter | |
| Effective area | Total area less 5mm strip around the perimeter | |
| Groove density tolerance | ±0.5% | |
| Coating | Gold(Au) | |
| Scratches and digs | 80-50(in accordance with MIL-O-13830A) | |
| Temperature | 0°C to 50°C | |
*1:The grating grooves are formed with resign.
*Be sure to prevent condensation. Otherwise, it causes significant deterioration of optical Characteristics