Cell Process Evaluation
Process 1: Si substrate surface cleaning
Evaluation method / Instrument required:
Process 2: Removing surface-damaged layer
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Process 3: Texturing to enhance light trapping effect
Process 4: n-layer formation by p diffusion
Evaluation method / Instrument required:
Process 5: PSG elimination
Process 6: Forming anti-reflective film
Evaluation method / Instrument required:
Process 7: Forming front and back electrodes, firing
Evaluation method / Instrument required:
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