Small Spot Analysis Kit for EDX-7000/8000

for EDX-7000/8000

For Analysis of Small Contaminants and Defect Analysis in Small Regions

Minimum 0.3 mm X-Ray Irradiation Diameter Effective for the Analysis of Small Contaminants and Small Regions



  • Minimum 0.3 mm X-Ray Irradiation Diameter
    The excitation X-rays can be collimated to 0.3 mm in diameter, which is effective for the high-accuracy analysis of small contaminants and for defect analysis in small regions, analyses difficult with standard specifications (minimum 1 mm in diameter).

  • Enlarged Sample Images without Image Quality Degradation
    This system supports smaller samples, which heightens the visibility of sample observation images. Users can switch to an enlarged image approximately 2.5 times larger than a previous image, without image quality degradation.

  • Automatic Four-Stage Switching Between 0.3, 1, 3, and 10 mm in Diameter
    The irradiation diameter automatically switches between 0.3, 1, 3, and 10 mm in diameter. This system supports not only the analysis of small spots but also macro composition analysis at 10 mm in diameter.


Note: The irradiation diameter is the size on the sample surface.

Analysis Example

Small Metal Powder (Approx. 0.1 mm in Diameter) Adhered to the Surface of Snacks

A small metal powder approximately 0.1 mm in diameter adhered to the commercially available snacks was analyzed with irradiation diameters of 1 mm and 0.3 mm respectively. At an irradiation diameter of 1 mm, the overall background is significantly increased due to the influence of scattered X-rays from the surrounding area of the metal powder (snacks), resulting in a poor S/N ratio. At an irradiation diameter of 0.3 mm however, the influence of scattered X-rays from the surrounding area is small, and peak profiles with a good S/N ratio are obtained.Copper (Cu) and Zinc (Zn) are detected as the major component with both irradiation diameters. It indicates that the metal powder is brass regardless of the irradiation diameter used. However, at 0.3 mm in diameter, the peak of Lead (Pb) is also identified, which suggests that the metal powder is not only the brass, but the "free cutting brass" contains Lead.
By using an irradiation diameter of 0.3 mm, more accurate analyses can be performed, even for small contaminants on substance such as organic materials that strongly scatter X-rays.

Also Capable of Film Thickness Measurements for Small Spots of Plating

When film thickness measurements are performed with the calibration curve method or the thin-film FP method, the sample (measurement position) must be larger than the X-ray irradiation diameter. This system supports film thickness measurements for small spots of plating, which were difficult at an irradiation diameter of 1 mm.

EDX-FTIR Contaminant Finder/Material Inspector EDXIR-Analysis

Provides Strong Support for Contaminant Identification Analysis

High-accuracy identification analysis can be performed automatically by measuring one sample with EDX and FTIR, and then analyzing both data sets with EDXIR-Analysis.

For more details, visit

For Research Use Only. Not for use in diagnostic procedures.

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