Analysis of Air in Cleanrooms
As electronic devices become more sophisticated, not only the inorganic microparticles in cleanroom air but the cleanroom construction materials, device manufacturing equipment, and organic compounds from human bodies have also become control items.
The air in a cleanroom was analyzed by a gas chromatograph-mass spectrometer (GC-MS).
Methoxyacetone, dichlorofluoromethane, and acetic acid are used as solvents in the cleanroom. The dimethyl silicon oligomer (n=5) is thought to be a volatile component of the caulking compound used during cleanroom construction.
Combining a gas chromatograph and a mass spectrometer, a GC-MS can accurately determine what a substance is (qualification) and how much of it exists (quantitation).
It is used for the analysis of trace components in diverse applications including the environment, electronics and semiconductors, chemistry, pharmaceuticals, foods, residual pesticides, and biochemistry.