Analysis of Trace Oganic Matter Adhered to Wafers

The atmosphere in contact with silicon wafers contains organic compounds from nearby materials, equipment, and people. In this example, an 8-inch silicon wafer was pressed against a wafer heating plate. The volatile gases generated from the wafer surface were collected and analyzed by a gas chromatograph-mass spectrometer (GC-MS).

The C12 (1-Dodecene), cyclic dimethylsiloxane (n=6), and dicarboxylic acid ester are thought to have been generated by the plastic parts.

Analysis of Trace Organic Matter Adhered to Wafers

Gas Chromatograph-Mass Spectrometer

Gas Chromatograph-Mass Spectrometer

Can identify the organic matter attached to a silicon wafer by measuring the spectrum of the gas (out-gas) generated by the organic matter when the disk is heated. Sampling is performed by an out-gas collector. This system permits ng-order quantitation.