Measurement of Transmittance and Reflectance Spectra of Optical Materials (UV)

A UV-NIR spectrophotometer can precisely measure transmittance and reflectance spectra over a wide range of wavelengths, from the near-infrared region to the ultraviolet region.

In this example, a UV-3700 UV-VIS-NIR spectrophotometer was used to measure the transmittance spectrum of a CD substrate and the reflectance spectra of silicon wafers.

Transmittance Spectrum of a CD Substrate

Transmittance Spectrum of a CD Substrate

Reflectance Spectra of Silicon Wafers

Reflectance Spectra of Silicon Wafers

UV-3700 UV-VIS-NIR Spectrophotometer

UV-3700 UV-VIS-NIR Spectrophotometer

The UV-3700 allows nondestructively measuring even very large samples, and performs spectrophotometric measurements across a wide wavelength range from the ultraviolet to the infrared.
Using materials with little absorption of deep-ultraviolet (DUV) light in the light source, detector, and integrating sphere and nitrogen purging all light paths including the monochromator and sample chamber permits measurements across a wide wavelength range from 165 to 3300 nm (using DUV model with options).