XPSX-ray Photoelectron SpectroscopyStructure

  • ・High Resolution Spectroscopy and Selected Area Spectroscopy
  • ・Quantitative Parallel Imagingr
  • ・Charge Neutralisation
  • ・Large Sample Handling
  • ・Delay-Line Detecto


System Functions

X-ray photoelectron spectroscopy (XPS), also known as ESCA (electron spectroscopy for chemical analysis) is a surface analysis technique which provides both elemental and chemical state information virtually without restriction on the type of material which can be analysed.

System Functions

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