Analysis of Trace Organic Foreign Matter on IC Chips
Foreign matter on an IC chip was measured using an IR microscope, which is particularly effective for the analysis of organic foreign matter from atmospheric dust and raw materials used in the manufacturing process.
The foreign matter in the diagram exhibits a unique amide compound peak, indicating that the foreign matter is biological in origin, such as a skin fragment.
The IR spectrum is a pattern based on molecular vibrations that offers information on the sample molecular structure. Combination with an IR microscope permits analysis of microscopic foreign matter down to 10 µm.