Since the concerns regarding harmful heavy metalsincrease in numerous fields, improvement in the detectionsensitivity of XRF analysis and the quantitativeaccuracy in non-standard-size samples isrequired. Shimadzu has approached these improvementsin two ways. First, the detection sensitivityhas been increased by a factor of 2 to 3 comparedto conventional machines, thanks to changing theprimary filter. Second, the improvement of thequantitative accuracy, regardless of the thickness,form, and size of the sample, using the BG (background)internal standard correction method1)2) hasbeen examined. The results of this research showthe utility and strength of XRF analysis as maximizinghigh throughput & non-destructive analysis. Thissystem is very effective for use in various regulationcompliance checks, such as the WEEE & RoHSdirectives and the ELV directive in the EU.