The type of foreign matter adhered or mixed into food products, pharmaceuticals, and products canbe easily determined in a short period of time using the EDX. If the observation capability of theCCD (optional) is utilized, foreign matter of less than 1mm can be easily measured. In addition, byusing an X-ray irradiation collimator, the neighboring foreign matter can be easily separated andanalyzed. 5 varieties of foreign matter (metal fragments) of about 0.3mm to 1mm were adhered orburied in a chocolate bar and used as the sample. The result of qualitative and quantitativeanalysis for each substance is shown below.