Quantitation of Phosphorus in a Silicon Wafer Using the PLS (Partial Least Squares) Method

In this article, examples of applying the PLS method for the determination of phosphorus and boron in silicon wafer are introduced.

Content Type:
Application
Document Number:
C103-E050
Product Type:
Molecular Spectroscopy, FTIR Spectroscopy
Keywords:
PLS, Electronics, Electronic, Semi-conductor, Electronic parts, Mounting board, Printed Circuit Board
Language:
English
File Name:
a263.pdf
File Size:
197kb

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