Trace Analysis of Carbon Dioxide in High-Purity Hydrofluorocarbon

Fluorocarbon, a generic term for organic compounds with C-F bonding, is a chemical material used as a refrigerant in refrigerators and freezers, and in air conditioners in cars, buses, other vehicles, and buildings. It is also used as a cleaning agent for electronic components and precision parts. Hydrofluorocarbon (HFC) is classified as a non-ozonedepleting chlorofluorocarbons(CFC) substitute and is used as a gas for semiconductor etching and electronic component cleaning. High-purity HFC is utilized in the semiconductor and electronics industries; confirming its purity requires measuring the concentration of impurities.

This data sheet introduces an example of analyzing trace quantities of CO₂ impurities in high-purity HFC using the Shimadzu "Tracera" High-Sensitivity Gas Chromatograph System.