Xslicer SMX-6000

Microfocus X-Ray Inspection System

Easy Operation

The new user interface is simple and intuitive, enabling inspections to be started as soon as the door is closed. This makes X-ray inspections easy to perform, even for operators using the system for the first time.

Intuitive Operability

A large monitor screen and simple button layout provide excellent visibility for intuitive operability.
Therefore, X-ray inspections can be performed easily, even by operators using the system for the first time.

 

Large Monitor
The system is equipped with a large 27-inch monitor.
The simple button layout and large high-resolution detector provides excellent visibility for observing details.

Stage Positioning Via the X-Ray Image
Simply click on any point in an X-ray image to control all stage movements, such as changing the XY position, tilt, rotation, or field-of-view size.

Using Exterior Images for Stage Positioning
An included dedicated camera obtains sample exterior images that capture the entire stage area. The stage position can be specified by simply clicking on any position in the exterior image. Zooming is also possible in the exterior image, so that the stage position can be specified in detail, at the part level. It also allows the user to operate the stage without looking away from the monitor.

Simple Workflow

After placing the work, fluoroscopic images can be obtained in just three steps.

STEP 1 Replace the previous work.

Click the work replacement button.

  • Stops X-ray emission.
  • Unlocks the electromagnetic lock on the front door.
  • The stage automatically moves to a position where it is easier to replace the work.

STEP 2 Start the inspection.

Close the front door and click [Start].

  • Emits X-rays.
  • Captures an exterior image of the entire stage area.

STEP 3 Position the stage.

Click on the exterior image to roughly position the stage.
Then click on the X-ray image to move the stage to the target observation point.

The new user interface enables all stage movement operations by simply clicking and dragging on the X-ray image.
Consequently, the user can move the stage quickly without looking away from the monitor.

Moving the Center Point

Click anywhere on the displayed X-ray image area to display that point at the center of the displayed image area.

Zoom In

Drag the pointer left to right across the displayed X-ray image area to magnify the specified area so it fills the screen.

Zoom Out

Drag the pointer right to left across the displayed X-ray image area to zoom out a given percentage.

Easy CT Imaging

Switching from fluoroscopy to CT imaging requires simply switching tabs. As a result, cross-sectional images of complex 3D structures that are difficult to differentiate using fluoroscopy can be viewed immediately with a simple operation.

CT imaging can display cross-sectional images of complex 3D structures, which may be difficult to differentiate using fluoroscopy, separated into separate layers.

Example 1

Example 2

CT images can be obtained at any portion within 350mm x 350mm area.

Smooth Switching

Switch between X-ray fluoroscopy and CT imaging simply clicking on the menu tab. Settings for CT imaging involve only selecting the scan mode, scan angle, and scan field-of-view. A seamless switching feature ensures that CT images can be obtained seamlessly for any point of interest in fluoroscopic inspections.

High-Speed Scan and Reconstruction

The new Xslicer CT image processing engine completely automates the calibration process, resulting in high-speed imaging. Cross-sectional images are displayed in as little as three minutes after starting CT scans (in the [Simple] mode). Xslicer dramatically increases reconstruction speeds as well, with cross-sectional images displayed only five seconds after data acquisition is finished.

High-Speed Scan and Reconstruction

The included Xslicer unit enables fully automated calibration and provides high-speed scanning and reconstruction. Cross-sectional images can be displayed in as little as three minutes after starting CT scans (in the [Simple] mode).

Principle of CT Imaging

X-ray fluoroscopic images are captured by tilting the flat panel detector and rotating it 360 degrees.
The resulting fluoroscopic images are then combined by a reconstruction process to create cross-sectional images.

Reference (Orthogonal CT)

X-rays are emitted in a direction orthogonal to the rotation direction.
Fluoroscopic images are taken from various directions, and are then reconstructed to obtain cross-sectional images of the work.

Advantages of Inclined CT

Enables High Magnification Scans of Flat Work

■ Inclined CT

Explanation
When large substrates are scanned with an inclined CT, the work is on the XY stage, so high magnification scans can be obtained by bringing it close to the X-ray generator.

■ Orthogonal CT

View of orthogonal CT from above the rotation table

Explanation
When large substrates are scanned with an orthogonal CT, if the work is brought closer to the X-ray generator in order to increase the magnification, will be obstructed by the X-ray generator during the CT scan, making high magnification scans impossible.

Example

Orthogonal CT

Xslicer SMX-6000

System Configuration / Ample Safety Measures

(1) Equipped with Microfocus X-ray Generator Unit Made by Shimadzu

Equipped with an open X-ray generator with 160 kV tube voltage and 1 µm resolution.
Due to the integrated high-voltage transformer, no greasing is necessary.
Automated adjustment simplifies the filament replacement process.

* 1 µm resolution: JIMA chart resolution

(2) Drive System Facilitating Inspections

High-speed XYZ-stage
Quickly moves to inspection points with ±180-degree rotation and 0 to 60-degree tilting.

(3) Prevents X-Ray Leakage Outside the System

Protective barrier blocks X-rays from escaping outside the system (1 μSv/h external X-ray leakage).

(4) Collision Sensor

A collision sensor around the X-ray detector stops the drive system in the event of an emergency (a collision with the sample).

(5) Front Door Lock Mechanism

The front door lock mechanism locks the front door during X-ray irradiation.
The interlock system also ensures safety by disabling X-ray irradiation and the drive system when the door is open.

(6) Software Limits

The software limit function prevents collisions with the flat panel detector by specifying settings based on the sample height.

Software Limits

Easy Measurements

BGA Measurements

The system can measure ball grid array (BGA) bump diameters and void ratios.
Thanks to our proprietary image processing algorithm, complex parameter settings are not required.*
Measurements can also be performed by storing multiple settings in advance, and then calling up different settings for each target examined.
*: Manual adjustments may be required depending on the sample.

(Measurable items)
・Total void ratio
・Maximum void ratio
・Bump diameter
・Bump roundness

Area Ratio Measurements

Thanks to our proprietary image processing algorithm, complex parameter settings are not required.*
Measurements can also be performed by storing multiple settings in advance, and then calling up different settings for each target examined. Pass/fail decisions can be performed based on the area ratios.
*: Manual adjustments may be required depending on the sample.

Wire Sweep Ratio Measurements

Wire sweep ratios can be measured by specifying both ends of a bonding wire and the maximum bend point.
Pass/fail decisions can be performed based on the wire sweep ratio.

Size Measurements

The system can perform two-point and three point measurements. With this system, calibration data is calculated internally in synch with the fluoroscopy magnification ratio, enabling efficient size measurements.

Various Features for Facilitating Inspections

Teaching Function

By registering inspection points in advance, sample inspections can be repeated efficiently.

The status is displayed on screen.

"Pass" decision
Defer
"Fail" decision
Not inspected or skipped
Currently being measured

With the teaching function, fluoroscopy and CT scans can be configured at various positions.

Stepwise Movement

The stepwise feed function is especially convenient for inspecting samples on a pallet or arranged in a grid pattern. Specify the interval between feeding each sample, how many times to feed a sample, and the amount of vertical and horizontal movement. The stage repeats stepwise movements in a staggered pattern.

Preset Function

Observation points and observation conditions can be registered easily. Preregistered imaging conditions can be reproduced by clicking on a registered number.

Automatic Image Quality Adjustment Function

This function sets the optimal observation conditions for each situation.

Depending on the changing conditions, the optimal window level and window width are specified in real time.

When selecting an area of interest, the window level and window width are optimized for the specified range.

Panorama Image

Optimal panoramic images can be obtained easily by simply specifying the image range on the exterior image.

For Research Use Only. Not for use in diagnostic procedures.

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