Observation Examples of Semiconductors

Example of the observation of the height aspect of lines and spaces via carbon nanotubes

Example of the observation of the height aspect of lines and spaces via carbon nanotubes

With this sort of high aspect-ratio sample, SPM observation has been difficult, because conventional tip probes do not reach the bottom areas. However, the development of tip probes adopting carbon nanotubes has enabled deep bottom observation. This technique has been applied to problems such as SAW filter quality control.

For Research Use Only. Not for use in diagnostic procedures.

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