Standard Specifications
Pump Main Unit
| Turbo molecular pump | TMP-1103LMP | TMP-1103LMPC | TMP-1103MP | TMP-1103MPC | |
|---|---|---|---|---|---|
| Inlet flange | VG200 / ICF253 / ISO200B | ||||
| Outlet flange | KF40 | ||||
| Cooling method | Water | Cooling fan | |||
| Ultimate pressure (after baking) (Note1) |
10-9 Pa order | 10-8 Pa order | 10-9 Pa order | 10-8 Pa order | |
| Maximum allowable inlet pressure (N2 continuous exhaust) |
70 Pa | 1.3 Pa | |||
| Maximum allowable outlet pressure | 800 Pa | 270 Pa | |||
| Pumping speed (Note 2) |
N2 | 1080 L/s | |||
| He | 1040 L/s | ||||
| H2 | 800 L/s | ||||
| Compression ratio | N2 | 109 | |||
| He | 107 | ||||
| H2 | 106 | ||||
| Rated speed | 36000 rpm | ||||
| Start-up time | 5 minutes or less | ||||
| Mounting position | In any desired direction | ||||
| Bake-out temperature at an inlet flange | 120 degrees C. or less | ||||
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | ||||
| Recommended flow rate of purge gas | 20 to 30 mL/min (Note 3) | ||||
| Environmental Temperatures | 0 to 40 degrees C. | ||||
| Admissible ambient magnetic field |
Radial direction | 3 mT | |||
| Axial direction | 15 mT | ||||
| Water | Flow rate | 1 to 3 L/min | - | ||
| Pressure | 0.2 to 0.5 MPa | ||||
| Temperature | 5 to 30 degrees C. | ||||
| Mass | 32 kg or less | ||||
| Corrosion resistance coating of a rotor | N/A | Coating | N/A | Coating | |
- (Note 1)When using a metal gasket at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10-7 Pa order.
- (Note 2)Without a protective net.
- (Note 3)mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)
Power Supply Unit
| Power supply unit | EI-R04M | |||||||
|---|---|---|---|---|---|---|---|---|
| Battery | Not Necessary | |||||||
| Exchangeable compatibility | The control cable and the motor cable are interchangeable between any pump and power supply unit. | |||||||
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |||||||
| Communication | Contact | REMOTE (MR-34)
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| Serial |
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| Environmental conditions | Temperature | Operation 0 to 45 degrees C. (No dew condensation) | ||||||
| Relative humidity | 40 to 80 %RH | |||||||
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz) | ||||||
| Maximum power | 1.0 kVA | |||||||
| Mass | 8 kg | |||||||
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