Shimadzu Review Vol.74 [3・4] (2017) - Sensor devices

SPECIALLY COLLECTED PAPERS

Development of the Large-Diameter Si(Li) Sensor

by Minoru Yamada1
(Received December 18, 2017)

Abstract

Shimadzu Corporation is developing a large-diameter silicon lithium (Si(Li)) sensor by applying technology to develop Si(Li) sensors for energy dispersive X-ray fluorescence spectrometers.
We applied Li drift on a 4-inch Si wafer as a necessary technology to develop such sensors and successfully obtained good results. We also started to create a method to reduce leak current to support larger-sized sensors and higher operating temperatures. So far, we have successfully reduced the leak current of sensors to 1/10000 of existing models.
This report also describes cosmic ray anti-particle measurement, which is an international project called General Anti-Particle Spectrometer (GAPS), as a reason for using these sensors. As larger and more sensitive equipment is required to observe cosmic rays, Shimadzu is expected to utilize its technologies to develop and manufacture sensors to develop large-diameter Si(Li) sensors.

Keywords: Si(Li), Li drift, Guard ring, GAPS, General anti-particle spectrometer

1Sensor Device Business Unit, Device Department, Shimadzu Corporation, Kanagawa, Japan

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