TOC and TN Evaluation of Hydrogen Peroxide Solution

User Benefits

・Simultaneous and rapid determination of total organic carbon (TOC) and total nitrogen (TN) in hydrogen peroxide solution can be realized. ・High-concentration hydrogen peroxide solution can be analyzed without dilution. ・Automatic analysis of multiple samples is possible, with the use of the ASI-L auto-sampler.

Introduction

Due to the characteristic of decomposing into water and oxygen, hydrogen peroxide has gained considerable attention as an environmentally friendly chemical. It finds versatile applications across various concentrations, ranging from common disinfectants and household bleach to industrial oxidants and cleaning agents in semiconductor manufacturing processes. In the field of semiconductors, as devices are becoming increasingly miniaturized and densely integrated, the demand for utmost purity in the chemicals used for cleaning processes has become increasingly stringent. Consequently, meticulous quality control may be necessary for cleaning agents such as hydrogen peroxide solution. By using the Shimadzu TOC-L Total Organic Carbon Analyzer, it is possible to measure the total organic carbon (TOC) in high-concentration hydrogen peroxide solution without dilution. Furthermore, by incorporating the TNM-L Total Nitrogen Unit, simultaneous measurement of total nitrogen (TN) concentration in hydrogen peroxide solution is achievable. This capability makes it a valuable tool for managing contamination in hydrogen peroxide solution. This article describes an example of TOC and TN measurements for 30 % hydrogen peroxide solution by using the Shimadzu TOC-L analyzer.

August 3, 2023 GMT