This is a transportable, general-purpose model suitable for
various applications ranging from instrument maintenance
to incorporation into an instrument. It is equipped with a
non-contact dry pump, and is ideal for clean rooms.
Performance and Specifications
| Detector Sensitivity | <8.00E-13Pa・m3/s [He] |
|---|---|
| Leak Rate Display Range | 10-13～100Pa・m3/s［He］、10-9～100Pa･m3/s[H₂] |
| Detection Gas | Helium / hydrogen |
| Analysis Tube | 270° deflection type (magnetic field deflection magnetic flux density 0.17 T) Yttria-coated iridium filament (2 built-in filaments) Temperature compensation automatic tuning sensitivity calibration |
| Vacuum System | Molecular drag pump (extraction system 70 L/s) Non-contact dry vacuum pump (250 L/min) Pirani vacuum gauge (2 systems) |
| Test Port | Maximum pressure: 1,000 Pa Connection port: NW25KF Helium pumping speed: 5.2 L/s |
| Mass | Main Unit MSE-2602: About 62 kg; MSE-2603: About 90 kg |
| Power Source | 100/110/120/200/220/230/240 V AC ±10 %, 50/60 Hz, 900 VA Please specify one when ordering |
| I/O | RS-232C/RS-485 interface EXT-UNIT interface (external unit) I/O (Input: 4 points, output: 12 points, NPN/PNP can be selected) |
MSE-2602 External Dimension Diagram
MSE-2603 External Dimension Diagram
