Shimadzu Helium Leak Detector for electronic devicesMSE-4400

MSE-4400
 

Using the bombing method, this in-line leak detector determines the air tightness of semiconductor/electronic parts such as quartz oscillators, SAW filters and optical communication devices.

Specifications MSE-4400

Sensitivity 10-13～100Pa・m3/s［He］
Leak rate for judgment 2.5×10-10Pa・m3/s［He］
Tact time 6 seconds order ( Vented with dry nitrogen)
Analyzer tube 270̊ magnetic deflecting type (Flux density : 0.17T)
Yttria-coated iridium filament (2 pcs.)
Automatic sensitivity calibration with temperature compensation
Vacuum System Molecular drag pump specially designed for leak detector (Structure of exhaust 70L/s)
Oil-sealed rotary vacuum pump
(fore vacuum pump) (30L/min 50Hz)
Oil-sealed rotary vacuum pump
(roughing vacuum pump) (1080L/min 50Hz)
Pirani gage : Provided in two lines
Test Chamber 300cc (D80×H60) Test work container equipped
Weight Main unit : approx. 260kg
Power Requirements 200VAC±10%, three phases, 50/60Hz, 3.0kVA
Input/output RS-232C interface
Printer interface

Dimensions MSE-4400

Dimensions MSE-4400

 

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