Standard Specifications of Pump
| Model | TMP-B300 | |||
|---|---|---|---|---|
| Cooling method | Natural Air Cooling | Forced Cooling | Water Cooling (Note 1) | |
| Ultimate pressure (Note 3) | after baking | (Note 2) | 10-8 Pa order (Note 3) | 10-8 Pa order (Note 3) |
| before baking | 10-6 Pa order | 10-6 Pa order | 10-6 Pa order | |
| Pumping speed (Note 4) | N2 | 280L/s | 280L/s | 280 L/s |
| He | 270L/s | 270L/s | 270 L/s | |
| H2 | 220L/s | 220L/s | 220 L/s | |
| Compression ratio | N2 | > 1×109 | > 1×109 | > 1×109 |
| He | 7×106 | 7×106 | 7×106 | |
| H2 | 1×105 | 1×105 | 1×105 | |
| Critical Back Pressure | 1300Pa | 1300Pa | 1300 Pa | |
| Maximum Outlet Pressure During Continuous Operation (Note 5) | N2 | 100Pa （temperature 35℃ or less） |
1000 Pa （temperature 25℃ or less） 930 Pa （temperature 35℃ or less） |
1300 Pa (temperature 40℃ or less） |
| N2 Gas Flow Rate for Continuous Operation | 10 SCCM （temperature 25℃） 4 SCCM （temperature 35℃） |
100 SCCM （temperature 25℃） 40 SCCM （temperature 35℃） |
240 SCCM (temperature 40℃ or less) |
|
| Mass | ICF | 9.4 kg | 9.7 kg | 10.1 kg |
| VG | 6.3 kg | 6.6 kg | 7.0 kg | |
| ISO | 6.0 kg | 6.3 kg | 6.7 kg | |
| KF | － | － | － | |
| Bearing Type | Active Magnetic Bearing / Ceramic Ball Bearing | |||
| Inlet flange | VG100，ICF152，ISO100 | |||
| Outlet flange | KF16 | |||
| Rated speed | 60000 rpm | |||
| Start-up time（Until 80%） | 3.5 minutes | |||
| Mounting position | All - direction | |||
| Noise(by Shimadzu's method) (Note 6) | Less than 50 db(A) | |||
| Admissible ambient magnetic field | Radial direction | 3 mT | ||
| Axial direction | 15 mT | |||
| Input electric power | Voltage | DC24 V ± 5 % | ||
| Maximum power | 180 W | |||
- (Note 1)Cooling water temperature: above the dew point and below 28°C, cooling water flow rate: 1 L/min
- (Note 2)Baking can only be performed under forced air cooling and water cooling specifications of the ICF flange.
- (Note 3)The values are for when a two-stage oil rotary pump (manufactured by Shimadzu Scientific Systems) is used as the auxiliary pump.
- (Note 4)Without a protective net. Pumping speed for N2 is 260 L/s with a protective net.
- (Note 5)The values for continuous operation are for when the exhaust gas flow rate from the inlet is 0 mL/min.
- (Note 6)Measurement values for ISO flange specifications.