Standard Specifications of Pump
| Model | TMP-B70 | |||
|---|---|---|---|---|
| Cooling method | Natural Air Cooling | Forced Cooling | Water Cooling | |
| Ultimate pressure (Note 2) | after baking | (Note 1) | 10-8 Pa order (Note 2) | 10-8 Pa order (Note 2) |
| before baking | 10-6 Pa
order |
10-6 Pa order | 10-6 Pa order | |
| Pumping speed (Note 3) | N2 | 70 L/s | 70 L/s | 70 L/s |
| He | 60 L/s | 60 L/s | 60 L/s | |
| H2 | 49 L/s | 49 L/s | 49 L/s | |
| Pumping speed（KF40） | N2 | 41 L/s | 41 L/s | 41 L/s |
| He | 46 L/s | 46 L/s | 46 L/s | |
| H2 | 42 L/s | 42 L/s | 42 L/s | |
| Compression ratio | N2 | > 1×109 | > 1×109 | > 1×109 |
| He | 4×107 | 4×107 | 4×107 | |
| H2 | 4×105 | 4×105 | 4×105 | |
| Critical Back Pressure （N2 gas、87,000rpm） | 1400Pa | 1400Pa | 1400Pa | |
| N2 Gas Flow Rate for Continuous Operation (Note 4) | N2 | 300 Pa（temperature 25℃ or less） 200 Pa（temperature 30℃ or less） |
900 Pa（temperature 25℃ or less） 600 Pa（temperature 35℃ or less） |
900 Pa（temperature 25℃ or less） 600 Pa（temperature 40℃ or less） |
| Maximum Outlet Pressure During Continuous Operation | 15 SCCM（temperature 25℃） 10 SCCM（temperature 30℃） |
40 SCCM（temperature 25℃） 30 SCCM（temperature 35℃） |
40 SCCM（temperature 25℃） 30 SCCM（temperature 40℃） |
|
| Mass | ICF | 4.8 kg | 5.0 kg | 4.9 kg |
| VG | 3.1 kg | 3.3 kg | 3.2 kg | |
| ISO | 2.8 kg | 3.0 kg | 2.9 kg | |
| KF | 2.9 kg | 3.1 kg | 3.0 kg | |
| Bearing Type | Active Magnetic Bearing / Ceramic Ball Bearing | |||
| Inlet flange | ICF114、VG65、ISO63K、KF40 | |||
| Outlet flange | KF16 | |||
| Rated spee | 87,000 rpm | |||
| Start-up time（80 %まで） | 1.7 minutes | |||
| Mounting position | All - direction | |||
| Noise(by Shimadzu's method) (Note 5) | 48 dB（A）or less | |||
| Admissible ambient magnetic field | Radial direction | 3 mT | ||
| Axial direction | 15 mT | |||
| Input electric power | Voltage | DC24 V ± 5 % | ||
| Maximum power | 120 W | |||
| ※1: | Baking can only be performed under forced air cooling and water cooling specifications of the ICF flange. |
| ※2: | The values are for when a two-stage oil rotary pump (manufactured by Shimadzu Scientific Systems) is used as the auxiliary pump. |
| ※3: | Without a protective net. |
| ※4: | The values for continuous operation are for when the exhaust gas flow rate from the inlet is 0 mL/min. |
| ※5: | Measurement values for ISO flange specifications. |