Standard Specifications of Pump
| Turbo molecular pump | TMP-1503LM | TMP-1503LMC | |
|---|---|---|---|
| Inlet flange | VG250 / ICF305 / ISO250B | ||
| Outlet flange | KF40 | ||
| Cooling method | Water | ||
| Ultimate pressure (after baking) (Note 1) | 10-8 Pa order | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate | 500 mL/min (Note 2) | 800 mL/min | |
| Maximum allowable inlet pressure (N2 continuous exhaust) | 133 Pa | ||
| Maximum Outlet Pressure During Continuous Operation | 270 Pa | ||
| Pumping speed (Note 3) | N2 | 1500 L/s | |
| He | 1200 L/s | ||
| H2 | 800 L/s | ||
| Compression ratio | N2 | 6×108 | |
| He | 1×104 | ||
| H2 | 1×103 | ||
| Rated speed | 30300 rpm | ||
| Start-up time | 7minutes or less | ||
| Mounting position | In any desired direction | ||
| Pump Inlet Baking Temperature | 120 ℃ or less | ||
| Vibration level (by Shimadzu's method) | 0.01 μm or less（single amplitude） | ||
| Recommended flow rate of purge gas | 20 ～ 30 mL/min (Note 2) | ||
| Recommended pumping speed of backing pump in case of gas purge | 600 L/min or more | ||
| Environment temperature | 0 ～ 40 ℃ | ||
| Admissible ambient magnetic field | Radial direction | 3 mT | |
| Axial directi | 15 mT | ||
| Water | Flow Rate | 1 ～ 3 L/min | |
| Pressure | 0.2 ～ 0.5 MPa | ||
| Temperature | 5 ～ 30 ℃ | ||
| Mass | 42 kg | ||
- (Note 1)The values are for when a metal gasket is used on the inlet flange. When an O-ring gasket is used, the achieved pressure is on the order of 10^-7 Pa.
- (Note 2)mL/min: volume flow rate at 0 degrees C., 1 atm (Compatible with SCCM).
- (Note 3)Without a protective net. Pumping speed for N2 is 1380 L/s with a protective net.
Standard Specifications of Power Supply Unit
| Power Supply | EI-R04M | |
|---|---|---|
| Battery | Unnecesssary | |
| Combination Compatibility | Compatible combination of pump, power supply unit, magnetic bearing cable and fan cable are available. | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. | |
| Communication | Contact | REMOTE （MR-34） |
| Input ： START / STOP / RESET / LOW SPEED | ||
| Output ： ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING | ||
| Serial | Front panel ： RS-232C （D-sub 9 pin male, Screw lock size M2.6） | |
| Rear panel ： RS-485 （D-sub 9 pin male, Screw lock size M2.6） | ||
| Permissible Ambient Conditions | Temperature | During Operation 0 ～ 45 ℃ （No condensation is necessary condition. ） |
| Humidity | 40 ～ 80 %RH | |
| Input electric power | Voltage | Single phase AC 200 ～ 240 V ± 10 % （50/60 Hz ± 2Hz） |
| Maximum power | 1.0 kVA | |
| Mass | 8 kg | |