Standard Specifications
Turbo molecular pump | TMP-V2304LM | |
---|---|---|
Inlet flange | VG250 / ISO250B | |
Outlet flange | KF40 | |
Cooling method | Water | |
Ultimate pressure (after baking) | 10-7 Pa order | |
Maximum allowable Argon gas flow rate (Note 1) |
600 mL/min (Note 2) | |
Maximum allowable inlet pressure (N2 continuous exhaust) (Note 1) |
4.5 Pa | |
Maximum allowable outlet pressure (N2 continuous exhaust) (Note 1) |
200 Pa | |
Pumping speed (Note 3)(Note 4) |
N2 | 2100 L/s |
Ar | 2000 L/s | |
Compression ratio | N2 | 1×108 or more |
He | 5×103 | |
H2 | 9×102 | |
Rated speed | 33700 rpm | |
Start-up time | 9 minutes or less | |
Mounting position | In any desired direction | |
Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | |
Recommended pumping speed of backing pump in case of gas purge |
1500 L/min or more | |
Display | LED | POWER / STATUS / ROTATION / NET |
Communication | Contact |
REMOTE (D-sub 37 pin female, Screw lock size M2.6) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION |
Serial | RS-232C / RS-485 (D-sub 9 pin male, Screw lock size M2.6) | |
Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
Water | Flow rate | 3 to 4 L/min |
Pressure | 0.2 to 0.4 MPa | |
Temperature | 19 to 30 degrees C. (above dew point) | |
Admissible ambient magnetic field | Radial direction | 3 mT |
Axial direction | 15 mT | |
Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
Maximum power | 1.2 kVA | |
Mass | 56 kg |
- (Note 1)Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable outlet pressure can not be satisfied at same time.
- (Note 2)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
- (Note 3)Without a protective net. Pumping speed for N2 is 1950 L/s with a protective net.
- (Note 4)Do not use corrosive gas because there is possibility that the pump breaks down by the product material.
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