Turbo Molecular PumpTMP-V3304LM(F)

Standard Specifications

Turbo molecular pump (Note 1) TMP-V3304LM (F)
Inlet flange VG300 / ISO320B / VG350
Outlet flange KF40
Cooling method Water
Ultimate pressure (after baking) 10-7 Pa order
Maximum allowable Argon gas flow rate
(Note 2)
1500 mL/min (Note 3)
Maximum allowable inlet pressure
(N2 continuous exhaust) (Note 2)
7 Pa
Maximum allowable outlet pressure
(N2 continuous exhaust) (Note 2)
270 Pa
Pumping speed
(Note 4)(Note 5)
N2 3200 L/s
Ar 3100 L/s
Compression ratio N2 1×109 or more
He 1×105
H2 6×103
Rated speed 27600 rpm
Start-up time 16 minutes or less
Mounting position In any desired direction
Vibration level (by Shimadzu's method) 0.01 µm or less (0-peak)
Recommended pumping speed
of backing pump in case of gas purge
1500 L/min or more
Display LED POWER / STATUS / ROTATION / NET
Communication Contact

REMOTE (D-sub 37 pin female, Screw lock size M2.6)

Input : START / STOP / RESET / LOW SPEED

Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION

Serial RS-232C / RS-485 (D-sub 9 pin male, Screw lock size M2.6)
Speed variation Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %)
Water Flow rate 3 to 4 L/min
Pressure 0.2 to 0.4 MPa
Temperature 19 to 30 degrees C. (above dew point)
Admissible ambient magnetic field Radial direction 3 mT
Axial direction 15 mT
Input electric power Voltage Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz)
Maximum power 1.2 kVA
Mass 94 kg
  • (Note 1)(F) apply ferromagnetic steel with nickel plating.
  • (Note 2)Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable outlet pressure can not be satisfied at same time.
  • (Note 3)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
  • (Note 4)Without a protective net. Pumping speed for N2 is 2900 L/s with a protective net.
  • (Note 5)Do not use corrosive gas because there is possibility that the pump breaks down by the product material.

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