Turbo Molecular PumpTMP-1003 Series

Standard Specifications

Pump Main Unit
Turbo molecular pump TMP-1003LM TMP-1003LMC TMP-1003M TMP-1003MC
Inlet flange VG200 / ICF253 / ISO200B
Outlet flange KF40
Cooling method Water Cooling fan
Ultimate pressure (after baking)
10-9 Pa order 10-8 Pa order 10-9 Pa order 10-8 Pa order
Maximum allowable inlet pressure
(N2 continuous exhaust)
400 Pa 1.3 Pa
Maximum allowable outlet pressure 665 Pa 40 Pa
Pumping speed
(Note 2)
N2 1080 L/s
He 930 L/s
H2 790 L/s
Compression ratio N2 1 x 109
He 8 x 104
H2 4 x 103
Rated speed 35000 rpm
Start-up time 5 minutes or less
Mounting position In any desired direction
Bake-out temperature at an inlet flange 120 degrees C. or less
Vibration level (by Shimadzu's method) 0.01 µm or less (0-peak)
Recommended flow rate of purge gas 20 to 30 mL/min (Note 3)
Recommended pumping speed of backing pump in case of gas purge 500 L/min or more
Environmental Temperatures 0 to 40 degrees C.
Admissible ambient
magnetic field
Radial direction 3 mT
Axial direction 15 mT
Water Flow rate 1 to 3 L/min -
Pressure 0.2 to 0.5 MPa
Temperature 5 to 30 degrees C.
Mass 32 kg or less
  • (Note 1)When using a metal gasket at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10-7 Pa order.
  • (Note 2)Without a protective net. Pumping speed for N2 is 970 L/s with a protective net.
  • (Note 3)mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)


Power Supply Unit
Power supply unit EI-R04M
Battery Not Necessary
Exchangeable compatibility The control cable and the motor cable are interchangeable between any pump and power supply unit.
Speed variation Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %)
Communication Contact





Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6)

Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6)

Environmental conditions Temperature Operation 0 to 45 degrees C. (No dew condensation)
Relative humidity 40 to 80 %RH
Input electric power Voltage Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz)
Maximum power 1.0 kVA
Mass 8 kg

This page may contain references to products that are not available in your country. Please contact us to check the availability of these products in your country.