Turbo Molecular PumpTMP-3804LMC

Standard Specifications

Pump Main Unit
Turbo molecular pump TMP-3804LMC
Inlet flange VG300 / ISO320B
Outlet flange KF40
Cooling method Water
Ultimate pressure (after baking) 10-7 Pa order
Maximum allowable Argon gas flow rate 2200 mL/min (Note 1)
Maximum allowable inlet pressure 40 Pa
Maximum allowable outlet pressure 270 Pa
Pumping speed
(Note 2)
N2 3800 L/s
Ar 3400 L/s
H2 2500 L/s
Compression ratio N2 1×109 or more
He 3×104
H2 2×103
Rated speed 24000 rpm
Start-up time 18 minutes or less
Mounting position In any desired direction
Vibration level (by Shimadzu's method) 0.01 µm or less (0-peak)
Recommended flow rate of purge gas 30 mL/min (Note 1)
Recommended pumping speed
of backing pump in case of gas purge
1500 L/min or more
Environmental Temperatures 0 to 40 degrees C.
Admissible ambient
magnetic field
Radial direction 3 mT
Axial direction 15 mT
Water Flow rate 2 to 4 L/min
Pressure 0.2 to 0.5 MPa
Temperature 5 to 25 degrees C.
Mass 115 kg
  • (Note 1)mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)
  • (Note 2)Without a protective net for VG300 flange. Pumping speed for N2 is 3450 L/s with a protective net.
Power Supply Unit
Power supply unit EI-R04M
Battery Not Necessary
Exchangeable compatibility The control cable is interchangeable between any pump and power supply unit.
Speed variation Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %)
Communication Contact REMOTE (MR-34)
Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6)
Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6)
Environmental conditions Temperature Operation 0 to 45 degrees C. (No dew condensation)
Relative humidity 40 to 80 %RH
Input electric power Voltage Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz)
Maximum power 1.5 kVA
Mass 8 kg

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