Standard specifications
| Turbo molecular pump | TMP-X1605LM | |
|---|---|---|
| Inlet flange | VG200/VG250/ISO200B/ISO250B | |
| Outlet flange | KF40 | |
| Pumping speed (Note) | N2 | 1400 L/s |
| Ar | 1330 L/s | |
| Rated speed | 37200 rpm | |
| Ultimate pressure (after baking) | 10-7 Pa order | |
| Maximum allowable inlet pressure (N2 continuous exhaust) |
26 Pa | |
| Maximum allowable outlet pressure (N2 continuous exhaust) |
266 Pa | |
| Start-up time | 8 minutes or less | |
| Noise | 57 dB（A）or less | |
| Mounting positio | In any desired direction | |
| Recommended flow rate of purge gas | 30 mL / min | |
| Admissible ambient magnetic field | Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Water | Flow Rate | 3 L/min or more |
| Pressure | 0.2～0.5 MPa | |
| Temperature | 19～30 degrees C.(above dew point) | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. | |
| Communication | Contact | REMOTE |
| Serial | RS-232C/RS-485/Profibus（option） | |
| Cooling Water Valve (Three-Way Valve) | DC24V、10W | |
| Error Record | the date and time of the past 99 error and detection details | |
| Electric power | Voltage | Single phas 200～240V±10％（50/60 Hz ± 2 Hz） |
| Maximum power | 0.75 kVA | |
| Protection rating | IP54 | |
| Mass | 41 kg | |
- (Note)Without a protective net.