Standard specifications
| Turbo molecular pump (Note 1) | TMP-V4404LMW | |
|---|---|---|
| Inlet flange | VG350 | |
| Outlet flange | KF40 | |
| Cooling method | Water | |
| Ultimate pressure (after baking) | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate (Note 2, Note 3) | 1450 mL/min | |
| Maximum allowable inlet pressure (N2 continuous exhaust)（Note ３） |
40 Pa | |
| Maximum allowable outlet pressure (N2 continuous exhaust)（Note ３） |
170 Pa | |
| Pumping speed (Note 4) | N2 | 4050 L/s |
| Ar | 4300 L/s | |
| Compression ratio | N2 | 1.5×107 |
| He | 4.0×103 | |
| H2 | 4.4×102 | |
| Rated speed | 24000 rpm | |
| Start-up time | 12 minutes or less | |
| Mounting position | In any desired direction | |
| Vibration level (by Shimadzu's method) | 0.01 μm or less（single amplitude） | |
| Recommended flow rate of purge gas (Note 2) | 30 mL/min | |
| Recommended pumping speed of backing pump in case of gas purge | 1500 L/min or more | |
| Environment temperature | 10 ～ 40 ℃ | |
| Admissible ambient magnetic field | Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Water (Note 5) | Flow Rate | 3 ～ 4 L/min |
| Pressure | 0.2 ～ 0.4 MPa | |
| Temperature | 19 ～ 30 degrees C.(above dew point) | |
| Display | LED | POWER / STATUS / ROTATION / NET |
| Communication | Contact | REMOTE（D-sub 25 pin male, Screw lock size #4-40UNC） |
| Input：START / STOP / RESET / LOW SPEED/ | ||
| Output：ROTATION / ACC. / BRAKE / NORMAL /REMOTE / ALARM / WARNING / CONNECTION | ||
| Serial | RS-232C / RS-485（D-sub ９ pin male, Screw lock size #4-40UNC） | |
| Speed variation | Speed is variable between 75 % and 100 % of the rated speed. (set as 0.1 %) | |
| Input electric power | Voltage (Note 6) | Single phase AC 200 ～ 240 V（50 / 60 Hz） |
| Maximum power | 1.2 kVA | |
| Mass | 98 kg | |
- (Note 1)Do not use corrosive gas because there is possibility that the pump breaks down by the product material.
- (Note 2)mL/min: volume flow rate at 0 degrees C., 1 atm (Compatible with SCCM).
- (Note 3)The maximum allowable flow rate depends on the gas type, the APC valve temperature, the gas purge flow rate and outlet pressure.
- (Note 4)Without a protective net. Pumping speed for N2 is 2900 L/s with a protective net.
- (Note 5)Water must keep temperature does not cause condensation.
- (Note 6)Temporary voltage variation tolerance range: ±10%, temporary frequency variation tolerance range: 2 Hz.
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