Standard Specifications of Pump
| Turbo molecular pump | TMP-1003LM | TMP-1003LMC | TMP-1003M | TMP-1003MC | |
|---|---|---|---|---|---|
| Inlet flange | VG200 / ICF253 / ISO200B | ||||
| Outlet flange | KF40 | ||||
| Cooling method | Water | Air | |||
| Ultimate pressure (after baking) (Note 1) | 10-9 Pa order | 10-8 Pa order | 10-9 Pa order | 10-8 Pa order | |
| Maximum allowable inlet pressure (N2 continuous exhaust) | 400 Pa | 1.3 Pa | |||
| Maximum Outlet Pressure During Continuous Operation | 665 Pa | 40 Pa | |||
| Pumping speed (Note 2) | N2 | 1080 L/s | |||
| He | 930 L/s | ||||
| H2 | 790 L/s | ||||
| Compression ratio | N2 | 1×109 | |||
| He | 8×104 | ||||
| H2 | 4×103 | ||||
| Rated speed | 35000 rpm | ||||
| Start-up time | 5minutes or less | ||||
| Mounting position | In any desired direction | ||||
| Pump Inlet Baking Temperature | 120 ℃ or less | ||||
| Vibration level (by Shimadzu's method) | 0.01 μm or less（single amplitude） | ||||
| Recommended flow rate of purge gas | 20 ～ 30 mL/min (Note 3) | ||||
| Recommended pumping speed of backing pump in case of gas purge | 500 L/min or more | ||||
| Environment temperature | 0 ～ 40 ℃ | ||||
| Admissible ambient magnetic field | Radial direction | 3 mT | |||
| Axial direction | 15 mT | ||||
| Water | Flow Rate | 1 ～ 3 L/min | ― | ||
| Pressure | 0.2 ～ 0.5 MPa | ||||
| Temperature | 5 ～ 30 ℃ | ||||
| Mass | 32 kg or less | ||||
- (Note 1)The values are for when a metal gasket is used on the inlet flange. When an O-ring gasket is used, the achieved pressure is on the order of 10^-7 Pa.
- (Note 2)Without a protective net. Pumping speed for N2 is 970 L/s with a protective net.
- (Note 3)mL/min: volume flow rate at 0 degrees C., 1 atm (Compatible with SCCM).
Standard Specifications of Power Supply Unit
| Power Supply | EI-R04M | |
|---|---|---|
| Battery | Unnecesssary | |
| Combination Compatibility | Compatible combination of pump, power supply unit, magnetic bearing cable and fan cable are available. | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. | |
| Communication | Contact | REMOTE（MR-34） |
| Input ：START / STOP / RESET / LOW SPEED | ||
| Output ：ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING | ||
| Serial | Front panel：RS-232C（D-sub 9 pin male, Screw lock size M2.6） | |
| Rear panel：RS-485（D-sub 9 pin male, Screw lock size M2.6） | ||
| Permissible Ambient Conditions | Temperature | During Operation 0 ～ 45 ℃ （No condensation is necessary condition. ） |
| Humidity | 40 ～ 80 %RH | |
| Input electric power | Voltage | Single phase AC 200 ～ 240 V ± 10 %（50/60 Hz ± 2Hz） |
| Maximum power | 1.0 kVA | |
| Mass | 8 kg | |