TMP-V4404LMW—First 4,000 L/s Class Model Dedicated to Coating Applications Offers Industry-Leading Performance and Sustainability
Improved Environmental Performance
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- Oil and
Maintenance Free* -
Reduced environmental load and running costsー Ideal replacement for oil diffusion pumps
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- 15% Reduction
Compared to
previous Shimadzu models -
Weight reduced to 98 kg－ Saves on resources and reduces labor for installation in manufacturing systems
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- 10% Reduction
Compared with
previous Shimadzu models -
Power consumption reduced to 180 W
(when pumping N2 at a flowrate of 100 sccm)－ Energy saving
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＊Depending on process or usage conditions may require overhaul cleaning in specific usage/application conditions.
Improved Performance and Functionality
Improved pumping speed: 4,050 L/s (Highest class in the industry)
- ー Contributes to higher quality thin films
Shorter startup times: 12 min max.(pump startup time)
- － Improved productivity
IP54 water-resistant
- － Suitable for a variety of operating environments
Applications
Vacuum vapor deposition systems and sputtering systems
Replacement for oil diffusion pumps
- － Optical parts for smartphones and automobiles
- － Solar panels
- － Low emission (Low-E) glass
※Detailed specifications will be released at a later date.
※Appearance and specifications are subject to change without notice for improvements.