Diffraction GratingsLaminar-type Diffraction Gratings for VUV/Soft X-ray Region

Configuration of Concave Gratings

AFM Image of Laminar Gratings
Groove density : 1200grooves/mm
Groove depth : 15nm

Applying holographic exposure method and ion-beam etching technology, Shimadzu has developed laminar gratings for spectroscopy in a range from the vacuum ultraviolet region to the soft X-ray region. These gratings have grooves with a rectangular profile, which are directly etched into blanks made of, for example, synthetic silica. (Refer to Fig.1.) Laminar gratings are recommended for oblique-incidence applications.


  • synchrotron radiation facility
Configuration of Concave Gratings

Fig.1 Groove Profile for Laminar Gratings


Configuration of Concave Gratings

Fig.2 Measurement for Absorption Spectrum of Argon