Groove Density of 3000 ~ 6000/mm is now compatible.
AFM Image of Laminar Gratings
Applying holographic exposure method and ion-beam etching technology, Shimadzu has developed laminar gratings for spectroscopy in a range from the vacuum ultraviolet region to the soft X-ray region. These gratings have grooves with a rectangular profile, which are directly etched into blanks made of, for example, synthetic silica. (Refer to Fig.1.) Laminar gratings are recommended for oblique-incidence applications.
- synchrotron radiation facility
Fig.1 Groove Profile for Laminar Gratings
Fig.2 Measurement for Absorption Spectrum of Argon
Correlation between Coating Material and Reflectance
※The graph is a simulation result using an ideal plane mirror with a film thickness of 30 nm and incident angle of 88 degrees. (Not guaranteed.)
※Wavelength can be converted to photon energy by the following equation:
E ≈ 1240 / λ
E [eV]: Photon energy
λ [nm]: Wavelength