Diffraction GratingsLaminar-type Replica Diffraction Gratings for VUV/Soft X-ray Region

Laminar-type Replica Diffraction Gratings for Soft X-ray Region
  • Aberration-corrected Laminar-type Replica Diffraction Gratings for flat-field Polychromators in the range from Vacuum Ultra-Violet(VUV) to Soft X-ray Region. We offer a wide range of lineups for wavelengths from 0.6 nm to 200 nm.
  • Less high order light due to laminar type grooves configuration, Low stray light by holographic manufacturing technology, and high resolution from aspherical waves exposure method .
  • Easy to design spectrometers with array-type detectors.
  • Suitable for monitoring EUV lights as well as for Emission Spectroscopy

Applications

Code number Groove
density
(at grating
center)
Wavelength range Detector length Mounting parameters Dimensions Coating material Code number
N
(grooves
/mm)
λ1-λ2
(nm)
L
(mm)
r
(mm)
α
(deg.)
r1’
(mm)
β1
(deg.)
r2’
(mm)
β2
(deg.)
ri’
(mm)
βi
(deg.)
WxHxT
(mm)
30-001 2400 1-6 23.5 237.0 88.65 235.6 85.81 238.5 80.17 235.0 90.00 50x30x10 Au 30-001
30-002 1200 5-20 25.3 237.0 87.00 236.7 83.04 241.1 77.07 235.0 90.00 50x30x10 Au 30-002
30-003 2400 1-7 26.8 236.7 88.60 235.8 85.79 239.5 79.39 235.0 90.53 50x30x10 Au 30-003
30-004 2400 0.6-4 19.4 236.8 88.65 233.9 86.64 235.8 81.94 233.5 90.00 50x30x10 Au 30-004
30-005 1200 3.5-8.5 11.1 237.0 87.07 234.8 83.98 236.2 81.30 233.5 90.00 50x30x10 Ni 30-005
30-006 300 20-80 25.3 237.0 87.00 236.7 83.04 241.1 77.07 235.0 90.00 50x30x10 Au 30-006
30-007 120 50-200 25.3 237.0 87.00 236.7 83.04 241.1 77.07 235.0 90.00 50x30x10 Au 30-007
30-008 1500 9-45 68.5 379.0 80.00 372.7 76.24 394.6 66.54 362.0 90.00 50x30x10 Au 30-008
30-009 500 27-135 68.5 379.0 80.00 372.7 76.24 394.6 66.54 362.0 90.00 50x30x10 Au 30-009

 

Mounting / Dimensions

Standard Specifications

Grating Type Unequally spaced curved-groove laminar-type replica grating*1
Blank material BK-7 or equivalent
Dimension tolerance ±0.2(W)×±0.2(H)
Center thickness tolerance ±0.5(T)
Effective area Total area less 5mm strip around the perimeter
Groove density tolerance ±0.5%
Scratches and digs 80-50 (in accordance with MIL-O-13830A)