SPM-Nanoa - Specs

Scanning Probe Microscope/Atomic Force Microscope

Wide Assortment of Expansion Functionality

SPM Unit


Max. scanning size (X,Y,Z)
10 μm x 10 μm x 1 μm (standard)
30 μm x 30 μm x 5 μm (optional)
125 μm x 125 μm x 7 μm (optional)
55 μm x 55 μm x 13 μm (optional)
2.5 μm x 2.5 μm x 0.3 μm (optional)

Sample Stage

Max. sample size
ø50 mm x 8 mm
For 50 mm diameter samples, only the central area can be observed

Max. stroke
±5 mm
When a 40 mm diameter or smaller sample is placed in the center of the scanner

Optical Microscope Observation

Total magnification rate
About 220 to 1300 times
(when maximum displayed on 21.5-inch monitor)

Installation Specifications

Installation Specifications

[Installation Environment] Temperature

23 °C ± 5 °C

[Installation Environment] Relative Humidity

60 % max. (with no condensation)

[Power Supply] Single Phase

100 to 240 V AC, 50/60 Hz, 15 A, one circuit

[Power Supply] Ground

Type-D ground (Grounding Resistance: 100 max.)

[Size and Weight of Units] Microscope Unit

W220 × D370 × H520mm 24kg

[Size and Weight of Units] Control Unit

W190 × D400 × H440mm 14kg

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