High Compression Ratio Type

• Hydrogen compression ratio of 106

Sputter process prevents harmful hydrogen partial pressure increase. Auxiliary pump can be also used.

• Battery-less turbomolecular pump with magnetic levitation

The power supply unit is maintenance-free.

• Compact pump body and power supply unit

Half-rack size power supply unit

• Tuning-free

Pumps, power supply units, and cables are interchangeable and easy to replace.

• RS-232C-compliant serial interface is equipped as standard.

Abnormalities in the pumping system can be found in early stages by monitoring the speed and motor current.

• Compliant with CCE marking, SEMI-S2, and NRTL

High Compression Ratio Type

Line up

High Compression Ratio Type Line-up