• Hydrogen compression ratio of 106
Sputter process prevents harmful hydrogen partial pressure increase. Auxiliary pump can be also used.
• Battery-less turbomolecular pump with magnetic levitation
The power supply unit is maintenance-free.
• Compact pump body and power supply unit
Half-rack size power supply unit
Pumps, power supply units, and cables are interchangeable and easy to replace.
• RS-232C-compliant serial interface is equipped as standard.
Abnormalities in the pumping system can be found in early stages by monitoring the speed and motor current.
• Compliant with CCE marking, SEMI-S2, and NRTL