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TOC-1000e S On-Line TOC Analyzer for Ultrapure Water

On November 28, Shimadzu Corporation globally released the TOC-1000e S on-line TOC analyzer for monitoring ultrapure water, which is essential in semiconductor manufacturing. This product uses a unique measurement algorithm to achieve stable measurement of TOC concentrations below 1μg/L, which is required for semiconductor manufacturing processes. In particular, the high detection capability and responsiveness to hard-to-oxidize compounds such as urea, which are required in the cutting-edge semiconductors manufacturing process, greatly contribute to improving the yield in the manufacturing process.

Total organic carbon (TOC) analyzers are instruments that measure the amount of organic carbon contained in water. TOC analyzers are widely used for ultrapure water management in semiconductor manufacturing, environmental monitoring, and industrial wastewater monitoring. Shimadzu brand TOC analyzers have earned a strong reputation as both laboratory instruments, such as for quality control of drinking water or pharmaceutical water, and as on-line instruments, such as those for monitoring the quality of effluent or environmental waters.

Ultrapure water, which has almost all impuritiesremoved, is essential for manufacturing semiconductors. When using large volumes of water to rinse silicon wafers during etching and polishing processes, even trace amounts of impurities in the water can cause circuit pattern defects or reduce yield. As semiconductors become increasingly miniaturized, the purity requirements for rinse water become stricter and demand of detection capability for hard-to-oxidize compounds has been increased.

The TOC-1000e S can detect urea and other hard-to-oxidize compounds with high sensitivity by irradiating samples with high-energy shortwave light emitted from an excimer lamp which has the Active-Path structure^*. It offers both high sensitivity and easier operation, while maintaining the popular small size, light weight, and user-friendliness of the previous series. Shimadzu will continue to provide a variety of products and technologies for semiconductor manufacturing.

• * Shimadzu’s unique design integrates the sample flow path into the light source for efficient UV irradiation of samples.

Features

1. Detects Hard-to-oxidize Compounds with High Sensitivity

Due to Shimadzu’s proprietary excimer lamp technology with Active-Path structure, the TOC-1000e S can detect urea and other conventionally hard-to-oxidize organic substances with high sensitivity. It enables real-time monitoring of factors that reduce semiconductor manufacturing yield.

2. Detects Impurities with High Responsiveness

Featuring a simple design that connects the lamp serially to a conductivity meter, the instrument continuously measures a portion of the sample water through the measurement channel. By immediately detecting any impurities entering the ultrapure water, it can help prevent product defects.

3. Retains the World-Class Compact, Lightweight Body and Ease of Use

Weighing only about 3 kg, its compact, lightweight design allows easy installation on a table, wall, or pipe. It features a touch panel for intuitive operation, a maintenance-free design for one year, and tool-free part replacement to reduce the burden on users.

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TOC-1000e S

Related Link
Semiconductor: Analytical and Measuring Instruments (Analysis Systems), Shimadzu Corporation