TOC-1000e S

On-Line TOC Analyzer for Ultrapure Water for the Semiconductor Manufacturing Process

In semiconductor manufacturing, even the smallest trace of contamination can compromise product quality. As semiconductor miniaturization continues to advance, minimizing trace-level organic contamination has become increasingly critical to maintain high product yield rate. As a result, the quality standards for ultrapure water used in semiconductor manufacturing are becoming even stricter. Especially in the manufacturing process of cutting-edge semiconductors, the need to detect urea and other hard-to-oxidize compounds has increased. Detecting those compounds has been difficult using conventional techniques. The TOC-1000e S on-line TOC analyzer for ultrapure water, incorporating feedback from cutting-edge semiconductor manufacturers, has been developed to address these challenges. 

Shimadzu has been a trusted provider of TOC analyzers for more than 50 years, establishing a legacy as the leader in TOC instruments. Now leveraging these decades of expertise and advanced techniques, Shimadzu delivers the TOC-1000e S on-line TOC analyzer for ultrapure water, specifically designed to meet the rigorous requirements of the modern semiconductor manufacturing process.