Quantitation of Phosphorus in a Silicon Wafer Using the PLS (Partial Least Squares) Method

Introduction

As typical methods of multivariate calibration analysis, multiple-linear regression and the PLS (partial least-squares) are often applied. The multiple-linear regression can be classified into CLS (Classical Least-Squares) method and ILS (Inverse Least-Squares) method, which are applied for simultaneous determination of multiple components and for the determination of specific components among multiple components respectively. The PLS method is notable for the solution of some problems peculiar to multiple-linear regression and for the excellent determination accuracy. In this article, examples of applying the PLS method for the determination of phosphorus and boron in silicon wafer are introduced.

June 5, 2003 GMT